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OALib Journal期刊
ISSN: 2333-9721
费用：99美元
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铝膜电导率尺寸效应对其微波性能的影响
, PP. 1099-1104
Keywords: 铝膜,电导率,尺寸效应,微波吸收率
Abstract:
采用中频磁控溅射法制备不同厚度的Al膜。利用直线型四探针法测量不同厚度Al膜的电导率，研究薄膜直流电导率随厚度的变化关系（尺寸效应）；并利用网络矢量分析仪测量Al膜与FR4-epoxy环氧树脂玻璃板复合结构微波吸收率，研究电导率尺寸效应对Al膜微波吸收性能的影响。实验结果表明薄膜厚度对金属Al膜的电导率产生主要影响；在Al膜和FR4-epoxy环氧树脂玻璃板复合结构中，Al膜电导率变化对复合结构的最大吸收峰值以及吸收峰值对应的Al膜厚度会产生显著影响。实验结果利用传输矩阵方法计算得到了验证。
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