OALib Journal期刊
ISSN: 2333-9721
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微组装Teflon/Si_3N_4多层膜的结构和微摩擦磨损性能
, PP. 655-660
Keywords: 聚四氟乙烯,多层膜,结构,微观摩擦
Abstract:
利用离子束增强交替溅射聚四氟乙烯和氮化硅靶的方法制备出微组装的Teflon/Si3N4多层膜,并通过PHI-5300、FT-IR2000、XRD和AFM/FFM等测定了多层膜的结构、力学性能和微观摩擦磨损性能实验结果表明Teflon/Si3N4多层膜由晶态的Teflon和非晶态的Si3N4组成;Teflon/Si3N4多层膜的硬度与韧性、摩擦系数与耐磨能力得到优化组合;Teflon/Si3N4膜的微摩擦力与载荷间呈良好的线形关系;当载荷大于70nN时,摩擦过程中Teflon会发生滑移,出现明显的磨损
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