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OALib Journal期刊
ISSN: 2333-9721
费用：99美元
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Ta等离子体渗氮的非平衡热力学
, PP. 149-152
Keywords: Ta,等离子体渗氮,非平衡热力学
Abstract:
讨论了Ta表面等离子体渗氮的热力学问题,将超平衡氢和非平衡热力学的反应耦合理论引入离子渗氮反应的计算,从理论上解释了等离子体和氢在Ta表面渗氮过程中的作用,给出了渗氮条件下的Ta-N-O非平衡定态相图,与实验结果符合得较好.实验表明,氢和等离子体的存在,有利于提高氮原子的活度,促进热力学上不稳定的Ta的氮化物的形成,抑制粗糙的Ta的氧化物的形成.
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