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OALib Journal期刊
ISSN: 2333-9721
费用：99美元
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Al离子高温注入Fe靶的表面合金化研究
, PP. 417-420
Keywords: Fe靶,Al离子注入,高温,表面合金化
Abstract:
利用能量120keV的Al离子注入250和500℃的Fe靶,研究了高温注入条件下Fe靶表层合金化过程.Fe靶表层Al的浓度－深度分布和相结构分别采用Rutherford背散射谱(RBS)和X射线衍射谱(XRD)分析.实验结果表明注入剂量为1？1017cm-2时,Al离子注入250和500℃Fe靶的注入深度分别为180和200nm,峰值浓度均为10%(原子分数)。离子注入层中形成了金属间化合物Al13Fe4相,同时记录到少量残留氧造成的氧化物AlFeO3相。利用有效形成热模型合理解释了Al离子高温注入Fe靶的合金相形成规律,利用相应金属离子高温注入金属靶传质模型可获得与实验相符的结果。
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