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OALib Journal期刊
ISSN: 2333-9721
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等轴应变作用下Cu,Al薄膜的取向择优生长
, PP. 809-813
Keywords: Cu膜,Al膜,择优生长
Abstract:
用分子动力学方法模拟了Cu双晶和Al双晶薄膜的111生长,模拟时假定在薄膜平面内保持恒定的等轴双向应变,薄膜中两晶粒的能量计算表明不同晶粒的能量存在差异,能量较低的晶粒在沉积中择优生长,逐渐取代能量较高的晶粒,Cu膜择优生长速率显著高于Al膜;两种薄膜择优生长的机制完全不同,Cu膜中处于不利位向的晶粒通过孪晶过渡转变为择优取向,转变完成、晶界湮灭后薄膜中残留的缺陷为位错;而Al膜则是通过无序结构重结晶实现上述转变,转变完成、晶界湮灭后薄膜中残留的缺陷为间隙原子.文中对上述择优生长驱动力的来源、以及在纳米多晶中的重要性进行了讨论.
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