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OALib Journal期刊
ISSN: 2333-9721
费用：99美元
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PCVD制备新型Ti-Si-C-N纳米复合超硬薄膜及其微观结构表征
, PP. 985-988
Keywords: Ti-Si-C-N,PCVD,纳米复合薄膜
Abstract:
用脉冲直流等离子体增强化学气相沉积(PCVD)方法，在高速钢试样表面沉积出一种新型Ti-Si-C-N薄膜材料.研究了不同SiCl4流量对薄膜成分、微观组织形貌以及薄膜晶体结构的影响.X射线衍射(XRD)、X射线光电子能谱(XPS)、透射电子显微镜(TEM)和扫描电子显微镜(SEM)分析结果表明Ti-Si-C-N薄膜是由Ti(C,N)/a-C/a-Si3N4组成的纳米复合结构，薄膜的晶粒尺寸在2？25nm范围内;当Ti-Si-C-N薄膜中N含量很少时，Ti(C,N)结构转变为TiC,薄膜的表面形貌由颗粒状转变为粗条状.
| [1] | Ma D Y,Ma S L, Xu K W. Surf Coat Technol, 2004; 184:182
|
| [2] | Ma D Y, Ma S L, Xu K W.Acta Metall Sin,2004;40: 1037 (马大衍,马胜利,徐可为．金属学报, 2004;40:1037)
|
| [3] | Ma D Y, Ma S L , Xu K W. Acta Metall Sin,2003;39: 1047 (马大衍,马胜利,徐可为．金属学报, 2003;39:1047)
|
| [4] | Heim D, Holler F, Mitterer C. Surf Coat Technol,1999; 116: 530
|
| [5] | Veprek S. Thin Solid Films,1995;268:64
|
| [6] | Ma D Y, Ma S L, Xu K W. Tribology, 2003; 215: 476 (马大衍,马胜利,徐可为．摩擦学报,2003;23:476)
|
| [7] | Ma S L, Ma D Y, Xu K W. Tribology, 2003; 23: 179 (马胜利,马大衍,徐可为．摩擦学报, 2003;23:179)
|
| [8] | Veprek S. Vaccum, 2002;67:443
|
| [9] | Ma S L, Xu K W. Acta Metall Sin, 2004;40:669 (马胜利,徐可为．金属学报,2004;40:669)
|
| [10] | Ma S L, Xu K W, Jie W. J Vac Sci Technol, 2004; 22B: 1694
|
| [11] | Karvankova P. Doctor Degree Thesis,Technical Univer sity Munich, Germany, 2003
|
| [12] | Niu X P. Master Degree Thesis, Xi'an Jiaotong University, 2004 (牛新平．西安交通大学硕士学位论文, 2004)
|
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