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OALib Journal期刊
ISSN: 2333-9721
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轴对称磁场对电弧离子镀弧斑运动的影响
DOI: DOI:10.3724/SP.J.1037.2009.00556, PP. 372-379
Keywords: 电弧离子镀,轴对称磁场,有限元分析,弧斑运动
Abstract:
研究了轴对称磁场对电弧离子镀弧斑运动的影响规律,利用有限元分析软件FEMM对轴对称磁场的分布进行了模拟,采用SHT-V型磁场测试仪测试了磁场强度,分析了靶面不同磁场分量的分布规律.从电弧斑点放电的物理机制出发,探讨了不同磁场分量和轴对称磁场对电弧离子镀弧斑运动的影响机制.结果表明,轴对称磁场通过影响空间正电荷密度n+的分布而作用于弧斑运动;随着轴对称磁场横向分量的增加,电弧斑点由随机运动逐渐转变为向靶面边缘扩展的旋转运动,弧斑运动速度加快,电弧电压升高,电流下降;当横向分量增加到临界强度(BT≈30Gs)时,弧斑在靶材边缘稳定的快速旋转运动并在靶沿处上下抖动,弧斑分裂,靶面中心处每隔0.5s左右出现多个细的圆斑线,然后很快向外扩展消失;靶材边缘出现明显的刻蚀轨道.
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