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OALib Journal期刊
ISSN: 2333-9721
费用：99美元
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C含量对ZrCN薄膜结构和力学性能的影响
DOI: 10.3724/SP.J.1037.2011.00714, PP. 469-474
Keywords: ZrCN薄膜,微结构,力学性能,摩擦磨损
Abstract:
通过非平衡磁控溅射的方法制备了不同C含量的ZrCN复合薄膜,采用XPS,XRD,SEM,AFM,纳米压痕仪和摩擦磨损仪等对薄膜的化学成分、微结构、表面形貌、力学性能及摩擦磨损性能进行了研究.结果表明,ZrCN薄膜中(C+N)/Zr原子比对薄膜的相组成、微结构和力学性能都有很大的影响.当(C+N)/Zr原子比小于1时,C进入ZrN的晶格间隙并形成Zr(C,N)固溶体.而当(C+N)/Zr原子比大于1时,多余的C形成非晶态的CN或单质C,ZrCN复合膜呈fcc结构.随着C含量升高,ZrCN复合膜的硬度先增大后减小,而摩擦系数逐渐减小,磨损所产生的磨痕逐渐变窄、变浅.C的加入使得ZrCN复合膜的摩擦磨损形式发生改变,摩擦磨损性能得到提高.含C量为13.2%的ZrCN薄膜硬度达到31GPa,摩擦系数仅为0.26,综合具备了硬度高、摩擦磨损性能好的优良特点.
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