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OALib Journal期刊
ISSN: 2333-9721
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纳米金属多层膜的变形与断裂行为及其尺寸效应*
DOI: DOI:10.3724/SP.J.1037.2013.00599, PP. 169-182
Keywords: 纳米金属多层膜,塑性变形,断裂行为,尺寸效应,界面
Abstract:
如何有效地协调和平衡材料强度与韧性之间的矛盾,大幅提高结构材料的损伤容限,是设计微观结构敏感性材料的巨大挑战.纳米金属多层膜材料由于其灵活可调控的微观结构特征以及优异的力学性能已成为目前高性能微元器件以及互连结构的核心材料体系,其服役过程中的变形损伤与断裂是导致系统失效的关键因素.本文结合当前国内外有关金属多层膜塑性变形与断裂行为研究的最新进展,阐述了金属多层膜(微柱体)微观结构-尺寸约束-服役性能三者之间的关联性,揭示了金属多层膜(微柱体)变形与断裂模式的内在规律及机制,并对金属多层膜研究的发展趋势进行了展望.
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