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OALib Journal期刊
ISSN: 2333-9721
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超大规模集成电路硅片溶液清洗技术的进展
Keywords: 集成电路,硅片,溶液清洗
Abstract:
本文综述了超大规模集成电路制造过程中硅片溶液清洗技术的研究历史及现状,并对技术的未来发展进行了展望。
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