关冉,张卫平,陈文元,等.石英微机械陀螺的研究进展[J].微纳电子技术,2011,49(3):173-180. Guan Ran, Zhang Weiping, Chen Wenyuan, et al. Research development of quartz micromachined gyroscopes[J]. Micronanoelectronic Technology, 2011,49(3):173-180. (in Chinese)
[2]
路文一,崔芳,冯立辉,等.石英音叉陀螺机械及静电耦合误差的消除[J].北京理工大学学报,2009,29(5):420-422. Lu Wenyi, Cui Fang, Feng Lihui, et al. Elimination of mechanical and electrostatic coupling errors in quartz tuing fork gyroscopes[J]. Transactions of Beijing Institute of Technology, 2009,29(5):420-422. (in Chinese)
[3]
谢立强,吴学忠,李圣怡.石英微陀螺的机械耦合问题研究[J].国防科技大学学报,2007,29(1):131-134. Xie Liqiang,Wu Xuezhong,Li Shengyi. The study of mechanical coupling in quartz micromachined gyroscope system[J]. Journal of National University of Defense Technology,2007,29(1):131-134. (in Chinese)
[4]
Yang Jun, Gao Zhongyu, Zhang Rong, et al. Mechanism analysis and system identification of the quadrature error in MEMS gyroscope[C]//Proceedings of MNC 2007. Sanya, China,[s.n.], 2007:437-443.
[5]
刘仁志.现代电镀手册[M].北京:化学工业出版社,2010. Liu Renzhi. Modern electroplating handbook[M]. Beijing: Chemical Industry Press, 2010. (in Chinese)
[6]
Montgomery D. Design and analysis of experiments[M]. New York: John Wiley and Sons-Inc., 2001.
[7]
陈晖,汪红,李光杨,等.水平与垂直流动对微电铸镀层均匀性的影响[J]. 传感器与微系统,2011,30(6):20-23. Chen Hui, Wang Hong, Li Guangyang, et al. Influence of horizontal and vertical flow pattern on coating uniformity inside micro-structures during electrodeposition[J]. Transducer and Microsystem Technologies, 2011,30(6):20-23. (in Chinese)
[8]
Stuart J K, Robert H M. Tuning fork with reduced error: European, 1174681B1[P]. 2010-06-02.
[9]
Osamu K, Shigeki M, Katsumi T, et al. Vibration type gyroscope and method for manufacturing vibration type gyroscope: US, 7207221B2[P]. 2007-04-24.
[10]
Arnaud P, Oliver L T, Steve M, et al. A coriolis vibrating gyro made of a strong piezoelectric material[C]//Proceedings of IEEE SENSORS 2007 Conference. Atlanta, Georgia, USA: IEEE, 2007:876-879.
