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大面积表面放电等离子体的产生及电特性研究

Keywords: 等离子体物理,大气压表面放电,非平衡等离子体,多电极,电特性

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Abstract:

为了获得大面积表面放电等离子体,设计了大气压多电极表面放电等离子体激励器,并对给定电源频率下等离子体激励器的放电特性(包括气体放电的利萨如图形、稳定放电时的功率及功率面密度等参数)进行了实验研究.实验测量结果表明,采用多电极结构表面放电等离子体激励器可以在较低的电源输入功率面密度下获得大面积的气体放电等离子体.

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