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半导体制造AMHS中悬挂式小车多因素调度方法

Keywords: 悬挂式小车,多因素,调度,二分图,自动物料搬运系统

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Abstract:

为提高半导体制造系统的整体性能,提出了一种考虑多因素的悬挂式小车(overheadhoisttransporter,OHT)调度方法.从工作站、晶圆批、搬运系统三方面分析了搬运距离、晶圆批优先级、工作站特性、OHT利用率、等待时间5个关键因素.以成本最小作为调度目标,基于这5个因素构造了混合多因素调度模型,同时引用二分图匹配方法构建了调度模型的求解算法.最后进行了仿真实验设计和分析,结果表明该方法是有效、可行的.

References

[1]  Koo P H, Jang J, Suh J. Vehicle dispatching for highly loaded semiconductor production considering bottleneck machines first [J]. International Journal of Flexible Manufacturing System, 2005,17(1):23-38.
[2]  Kim B I,Shin S J, Jung J J. Effective overhead hoist transport dispatching based on the Hungarian algorithm for a large semiconductor fab[J]. 2009,47(10):2823-2824.
[3]  Wang C N, Chen L C. The heuristic preemptive dispatching method of material transportation system in 300 mm semiconductor fabrication[J]. Journal of Intelligent Manufacturing, 2012,23(5):2047-2056.
[4]  Jang J J, Suh J D, Ferreira P M. An AGV routing policy reflecting the current and future state of semiconductor and LCD production lines[J]. International Journal of Flexible Manufacturing System, 2001,39(17):3901-3921.
[5]  Liao D Y, Fu H S. Dynamic OHT allocation and dispatching in large-scale 300mm AMHS management[J]. IEEE Robotics& Automation Magazine, 2004,11(3):22-32.
[6]  Kuo C H, Huang C S. Dispatching of overhead hoist vehicles in a fab intra-bay using a multi-mission-oriented controller[J]. International Journal of Advanced Manufacturing Technology, 2006(27):824-832.
[7]  Wang K J, Lin J T, Weigert G. Agent-based inter-bay system control for a single-loop semiconductor manufacturing fab[J]. Production Planning & Control, 2007,18(2):74-90.
[8]  Wu L H, Mok P Y, Zhang J. An adaptive multi-parameter based dispatching strategy for single-loop inter-bay material handling systems[J]. Computers in Industry, 2011,62(2):175-186.
[9]  Zhou B H, Anar J M, Zheng W. Vehicle OHT dispatching performance analysis of an AMHS in 300mm semiconductor FABs[J]. Journal of Donghua University, 2012,29(3):56-61.

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