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电化学  2014 

水溶液中电化学沉积GaSb相变存储薄膜

DOI: 10.13208/j.electrochem.130322, PP. 134-138

Keywords: GaSb薄膜,电化学共沉积,乙二醇

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Abstract:

利用恒电位共沉积技术和热处理的方法成功制备了GaSb薄膜,探索了添加乙二醇溶剂对薄膜结晶性和形貌的影响.采用循环伏安法初步研究了共沉积GaSb的机理,并用X-射线衍射技术(XRD)、扫描电子显微技术(SEM)和能谱分析(EDS)表征、观察样品.研究表明,在沉积过程中,SbO+先还原成Sb单质,再诱导Ga3+发生共沉积;沉积电位对薄膜的结晶性、微观形貌和成分有显著影响;电解液加入乙二醇更利于在较正电位下直接沉积出GaSb,且有效地提高了薄膜的结晶度,改善了薄膜的微观形貌.

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