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基于GMM的间歇过程故障检测

DOI: 10.16383/j.aas.2015.c130680, PP. 899-905

Keywords: 间歇过程,多阶段操作,故障检测,高斯混合模型,全局概率指标

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Abstract:

?对间歇过程的多操作阶段进行划分时,往往会被离群点和噪声干扰,影响建模的精确性,针对此问题提出一种新的方法:主元分析--多方向高斯混合模型(Principalcomponentanalysis-multipleGaussianmixturemodel,PCA-MGMM)建模方法.首先用最短长度法对数据进行等长处理,融合不同展开方法相结合的处理方式消除数据预估问题;利用主元分析方法将数据转换到对故障较为敏感的低维子空间中,得到主元的同时消除了离群点和噪声的干扰;通过改进的高斯混合模型(Gaussianmixturemodel,GMM)算法对各阶段主元进行聚类,减少了运算量的同时自动得到最佳高斯成分和对应的统计分布参数;最后将局部指标融合为全局概率监控指标,实现了连续的在线监控.通过一个实际的半导体制造过程的仿真研究验证了所提方法的有效性.

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