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直线超声电机驱动精密二维定位平台系统

DOI: 10.13334/j.0258-8013.pcsee.2014.18.012, PP. 2960-2966

Keywords: 直线超声电机,压电,精密定位,复合控制

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Abstract:

针对当前精密作动技术领域对精密定位系统提出越来越高的要求,设计了一种由蝶形直线超声电机驱动的二维精密定位平台系统。该定位平台系统行程为50mm×50mm,以直线型增量光栅编码器作为位置反馈元件,通过上位机编程实现运动控制卡对精密定位平台系统进行控制。为了实现直线超声电机的驱动,设计了一种新型直线超声电机驱动器,实现驱动电压和驱动频率的独立控制。在控制过程中,通过使用复合控制技术,同时结合直线超声电机具有高分辨率步进的控制特性,最终使系统达到高精度运动的控制效果。实验结果表明,在0~50mm行程内,实现了小于0.28μm的定位精度。

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