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科学通报  2014 

石墨烯霍尔元件

DOI: 10.1360/N972014-00516, PP. 3212-3223

Keywords: 石墨烯,传感器,霍尔元件,迁移率,集成电路

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Abstract:

回顾了石墨烯霍尔元件的现状,并展望了其应用前景.石墨烯霍尔元件能够充分发挥石墨烯材料迁移率高和单原子薄层等优势,规避其没有带隙或者小带隙的缺陷,其主要的性能包括灵敏度、线性度、分辨率、温度稳定性等都超过了基于传统半导体材料的霍尔元件,而且制备工艺简单,容易得到高性能的石墨烯磁敏传感器.基于化学气相沉积(CVD)生长并转移到绝缘基底上的石墨烯材料,批量制备出高质量性能均匀的石墨烯霍尔元件.通过低温的器件加工工艺,将石墨烯霍尔元件集成到硅基互补性金属氧化物半导体(CMOS)电路中,实现了高性能混合霍尔集成电路,展示了石墨烯霍尔元件与硅基CMOS集成电路良好的工艺兼容性.

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