Manz A, Graber N, Widmer H M. Miniaturized total chemical analysis systems: a novel concept for chemical sensing [J]. Sensor. Actuator. B-Chem., 1990, 1(1): 244
[2]
Whitesides G M. The origins and the future of microfluidics [J]. Nature, 2006, 442: 368
[3]
Dittrich P S, Manz A. Lab-on-a-chip: microfluidics in drug discovery [J]. Nat. Rev. Drug Discov., 2006, 5(3): 210
[4]
Lee L J. Design and fabrication of CD-like microfluidic platforms for diagnostics: Polymer-based microfabrication [J]. Biomed. Microdevices, 2001, 3(4): 339
[5]
Li C W, Cheung C N, Yang J, et al. PDMS-based microfluidic device with multi-height structures fabricated by single-step photolithography using printed circuit board as masters [J]. Analyst, 2003, 128(9): 1137
Rao P N, Kunzru D. Fabrication of microchannels on stainless steel by wet chemical etching [J]. J. Micromechan. Microeng., 2007, 17(12): N99
[9]
Ho S, Nakahara T, Hibbard G D. Chemical machining of nanocrystalline Ni [J]. J. Mater. Proc. Technol., 2008, 208(1): 507
[10]
Fonda P, Nakamoto K, Heidari A, et al. A study on the optimal fabrication method for micro-scale gyroscopes using a hybrid process consisting of electric discharge machining, chemical etching or micro-mechanical milling [J]. CIRP Annals-Manuf. Technol., 2013, 62(1): 183
Kawan A, Yu S J, Park H J, et al. Erratum to: Fabrication of geometric sapphire shaped InGaN/Al 2 O 3 (S) LED scribed by using wet chemical etching [J]. J. Korean Phys. Soc., 2014, 64(12): 1935
McGeough J A, Leu M C. Electroforming process and application to micro/macro manufacturing [J]. CIRP Annals-Manuf.Technol., 2001, 50(2): 499
[15]
Weinmann M, Weber O, B?hre D, et al. Photolithography-rlectroforming-pulse electrochemical machining: An innovative rrocess chain for the high precision and reproducible manufacturing of complex microstructures [J]. Int. J. Electrochem. Sci., 2014, 9: 3917
[16]
Kim J S, Min I K, Kim J D. Development of a selective electroforming process for micro-sized probe tips used in LCD inspection machines [J]. J. Phy., Conf. Ser., 2012, 379(1): 012039
