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基于前馈控制的等离子体电源恒流控制策略

, PP. 187-195

Keywords: 前馈控制,恒流源,等离子体负载,输出导纳

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Abstract:

为抑制负载扰动对恒流控制的影响,针对等离子体负载需求,提出一种基于前馈控制的等离子体电源恒流控制策略。首先根据恒流源的开环传递矩阵,探讨输出导纳对恒流电源负载扰动的影响机理,然后在分析等离子体负载模型以及电弧放电所带来的负载扰动问题的基础上,将电压前馈控制引入电流闭环中。从降低恒流控制变换器的等效导纳的角度,进行电压前馈补偿函数的设计,并分析负载模型参数对前馈补偿函数的影响,对比引入电压前馈控制前后负载扰动的噪声衰减情况。仿真和实验结果表明,基于前馈控制的等离子体电源恒流控制策略能有效抑制等离子体负载突变对恒流输出的扰动,改善了恒流控制系统的动态响应性能,并对减少溅射镀层缺陷、提高膜层质量有良好的效果。

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