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化工学报  2015 

流体微通道浸泡蚀刻技术实验

DOI: 10.11949/j.issn.0438-1157.20150132, PP. 4115-4122

Keywords: 微制造,不锈钢板,化学反应,蚀刻溶液,蚀刻质量,表面形貌,测量

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Abstract:

微细加工技术是伴随着微制造的出现而产生的一类新型现代化制造技术,它实现了微小尺度范围内的机械加工和装配。化学蚀刻技术是微细加工技术主要的加工方法之一,包括浸泡、鼓泡、喷淋等方法,其中浸泡式蚀刻方法相对来说设备简单、操作方便、节约成本。本文采用单因素浸泡式方法对不锈钢板蚀刻进行了实验研究,研究了蚀刻时间、蚀刻液组分浓度及温度等因素对化学蚀刻质量的影响。结果表明,蚀刻液中FeCl3浓度、H3PO4浓度、温度等对蚀刻速度、蚀刻均匀性、侧蚀及粗糙度有较大的影响。研究结果对流体微细通道的制造提供了初步工艺参数。

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