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飞秒激光辐照下硅薄膜的非傅里叶能量输运研究

DOI: 10.11858/gywlxb.2007.02.011, PP. 183-187

Keywords: 飞秒激光,非傅里叶能量输运,数值模拟,硅薄膜

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Abstract:

在双曲双步输运模型基础上建立数值模型,针对超短脉冲激光作用下硅薄膜的微观能量输运过程展开理论研究。针对电子、晶格超快温升响应过程的数值模拟结果表明,电子作为主要能量载子在几皮秒内主导了能量输运过程。电声子之间的能量耦合系数主要依赖于电子温度,而不是晶格温度。能量耦合过程由于非平衡电子的弹道式输运而呈现非局域性。热波的传播速度与电子能量传播速度有相同量级,而大于硅材料中的声子平均速度。模型预测与相关实验结果吻合。

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