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化学气相沉积层状BCx/SiC涂层自愈合机制

, PP. 125-132

Keywords: 化学气相沉积,BCx,涂层,氧化行为,自愈合,机制

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Abstract:

采用化学气相沉积法(chemicalvapordeposition,CVD)在SiC上制备了BCx涂层,研究了静态空气条件下BCx的氧化行为,并获得BCx氧化的动力学参数,对裂纹的愈合时间进行了预测。采用压痕法,在BCx/SiC层状结构中预制微裂纹,以观察B2O3玻璃相对裂纹的愈合情况。通过扫描电镜(SEM)对裂纹的愈合情况进行观察,结果表明,理论预测结果与实验验证能够很好地吻合。

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