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碳化硅与氧化铝界面化学稳定性研究

, PP. 61-68

Keywords: 碳化硅,氧化铝,界面热力学,化学稳定性

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Abstract:

借助最新最权威基本的热力学数据,按化学平衡理论,分析SiC和Al2O3之间可能发生的化学反应,定量计算SiC中不同C活度、不同固相产物活度,不同温度下SiC和Al2O3间诸反应各气相产物分压和分压总和,精确分析SiC和Al2O3界面的热力学稳定性,提供一个大气压惰性气体环境SiC和Al2O3界面的热力学失稳判据,为SiC材料研究者提供可靠的参考资料。

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