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FeSi熔体中SiC晶须的VLS生长

, PP. 97-102

Keywords: SiC晶须,液相法,VLS生长机理

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Abstract:

在1500℃、1600℃、1650℃和1750℃氩气中保温3h,使Fe-Si在石墨基板上熔化并敷展,分别在熔层表面获得SiC颗粒层、SiC颗粒与晶须混合层、SiC晶须层和SiC腾空薄膜。XRD分析确定所有产物均为3C-SiC;TEM和SAED分析表明,SiC晶须为3C-SiC单晶,生长方向为[111]。基于上述结果,提出不同温度下C与熔体中的Si经不同反应路径,生成不同形貌SiC的反应机理:低温时(≤1500℃),Fe提高了熔体中C的饱和溶解度,以液-固(LS)反应生成SiC颗粒;较高温度时(1500~1750℃),借助Fe的催化作用,以气-液-固(VLS)机理生成SiC晶须;更高温度时(≥1750℃),气-液-固(VLS)变得无序,生成SiC腾空连续膜。

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