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Fe刻蚀金刚石的研究

, PP. 132-136

Keywords: 刻蚀,烧结,扩散

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Abstract:

用AES(AugerElectronSpectroscopy)微区成分分析法研究了金刚石与Fe的相界面附近C原子的分布与规律,建立了在950℃、6min烧结条件下C原子在Fe中分布的经验公式,并探讨了Fe对金刚石刻蚀的过程与机制

References

[1]  1 Ralchenko V G,Kononenko T V,Pimenov S M,et al.Catalytic interaction of Fe,Niand Pt with diamond films:patterning applications.Diamond and Related Materials,1993,2:904~909
[2]  2 Grigoriev A P,Lifshits S K,Shamaev P P.Method of treating diamond.US Pat,1982,4,339,304
[3]  3 Jin S,Graebner J E,Kamm lott G W,Tiefel T H,et al.Massive thin ning of diamond films by a diffusion process.Appl Phys Lett,1992,60(16):1948~1950

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