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激光气相合成Si/C/N纳米复合粉

, PP. 35-39

Keywords: 激光,六甲基二硅胺烷,NH3,Si/C/N纳米复合粉

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Abstract:

本文以大功率CO2激光器为能源,以廉价的六甲基二硅胺烷[(CH3)3Si]2NH(简称HMDS)和NH3(加或不加)为原料,合成出纳米非晶Si/C/N复合粉末。研究了HMDS流量和NH3对粉末组成的影响。结果表明:随HMDS流量(1000~2000ml/min)的升高,粉末的碳含量稍微降低,氢含量稍微升高,而硅、氮含量基本不变。加入NH3可大幅度降低粉末的碳含量,提高氮含量。粉末的粒径分布范围为10~50nm,为非晶态。在实验范围内,粉末的制备产率为62~113g/h.

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