Dispersive coupling and optimization of femtogram L3-nanobeam optomechanical cavities

We present the design of a femtogram L3-nanobeam photonic crystal cavity for optomechanical studies. Two symmetric nanobeams are created by placing three air slots in a silicon photonic crystal slab where three holes are removed. The optical quality factor (Q) is optimized up to 52,000. The nanobeams' mechanical frequencies are higher than 600 MHz due to their femtogram effective modal masses. The optical and mechanical modes are dispersively coupled with a vacuum optomechanical coupling rate g0/2pi exceeding 200 kHz. The anchor-loss-limited mechanical Q of the differential beam mode is evaluated to be greater than 10,000 for structures with ideally symmetric beams. The influence of variations on the air slot width and position is also investigated. The devices can be used as ultrasensitive sensors of mass, force, and displacement.