Due to the rise of biological and MEMS
technology in recent years, some micro flow system components have drawn
attention and been developed by many investigators. The importance of micro-pumps
manufactured is higher than the other part of micro flow system since it is the
power source of the entire micro-flow system and responsible for driving
working fluid in the microfluidic system. In actual operation, the instability
and bad dynamic characteristics of the micro-pump will cause larger fluid flow
mobility error, such as transport behavior and response procedures failure,
etc., and even damage the microfluidic system. Therefore, to investigate the
stability and dynamic characteristics of a micro pump is necessary. The Finite
element analysis (FEA), ANSYS Workbench, is employed to analyze the dynamic characteristics
of this micro pump, and experiment is also considered in this study.
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