Multiple Ion Cluster Source for the Generation of Magnetic Nanoparticles: Investigation of the Efficiency as a Function of the Working Parameters for the Case of Cobalt
We present dataset of Co nanoparticles production using a Multiple Ion Cluster Source (MICS). We study the evolution of the mean size and deposition rate of Co nanoparticles as a function of the power and argon flux applied to the Co magnetron, the aggregation length of the Co magnetron and the total argon flux. The results show the strong influence of these parameters on the mean size of the nanoparticles and the efficiency of the process as well as on the atomic deposition rate. In particular, it is shown that nanoparticles of mean size ranging from 4 to 14？nm can be produced and that the influence of the working parameters on the production of magnetic nanoparticles is more complex than for the case of noble metal presented previously. 1. Introduction One of the ultimate goals in nanotechnology is to provide new systems of production; however, it is reasonable to consider that the success of nanotechnology will rely on its capability of complementing actual technologies before substituting them [1]. The fabrication of nanoscale materials with the expected new properties arising from their reduced size is a prerequisite for their successful use in next generation nanotechnological applications such as magnetic recording, sensing, and biological diagnosis, for example, [2–5]. For these reasons, a great variety of nanoparticle synthesis methods have been developed [6–11]. Among different methods for producing nanoparticles (NPs), the gas-phase synthesis comprises well-known techniques for the production of an extensive variety of nanosized particles [12–15]. These fabrication methods allow the continuous production of clusters with a wide range of sizes (few nm to tens of nm) [16–19]. The gas-phase synthesis processes have been extensively studied [20–24] with a special focus on the nanoparticle yield issues and have become a popular technique for large-scale production and for fundamental studies. On the other hand, gas-phase techniques have the intrinsic added value of producing particles without impurities. As they are generated in vacuum conditions, they are more pure than liquid-based processes since the presence of contaminants from the solution, detrimental for electric and magnetic properties [25–27], is avoided. The presence of impurities can be strongly reduced or even avoided in vacuum and gas-phase systems, which make these techniques the best choice when the NPs purity is critical for specific applications. Haberland et al. [28] developed a gas-phase nanocluster fabrication system using a magnetron sputtering gun to generate the material
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