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A 25?kW, 25?kHz Induction Heating Power Supply for MOVPE System Using L-LC Resonant Inverter

DOI: 10.1155/2013/584129

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Abstract:

A topology named L-LC resonant inverter (RI) for induction heating (IH) applications takes most of the merits of the conventional series and parallel resonant schemes, while eliminating their limitations. In this paper, fundamental frequency AC analysis of L-LC RI is revisited, and a new operating point is suggested featuring enhanced current gain and near in-phase operation as compared to the conventional operating point. An approximate analysis of the circuit with square-wave voltage source is also described highlighting the effect of auxiliary inductor on the source current waveform. The analysis also leads to an optimum choice of the auxiliary inductance. The requirements of the metal organic vapour phase epitaxy (MOVPE) system in which a graphite susceptor is required to be heated to 1200°C demanding a 25?kW, 25?kHz IH power supply, the configuration of developed IH system, and experimental results are presented. 1. Introduction The induction heating (IH) [1] is commonly used for heat treatment of metals (hardening, tempering, and annealing), heating prior to deformation (forging, swaging, upsetting, bending, and piercing), brazing and soldering, shrink fitting, coating, melting, crystal growing, cap sealing, sintering, carbon vapor deposition, epitaxial deposition, and plasma generation. IH is a noncontact method. The heat is generated only in the part, not in the surrounding area except by radiation. The location of the heating can be defined to a specified area on the metal component, thereby achieving accurate and consistent results. As heating occurs in the object itself, IH is considered more efficient than alternative methods. An IH system comprises a basic induction power source which provides the required power output at the required power frequency, complete with matching components, an induction coil assembly, a method of material handling, and some method of cooling. Generally, full-bridge or half-bridge resonant inverters (RIs) are most commonly used as the power supplies for IH. The equivalent model of an IH coil with work piece can be represented in simplified form by an equivalent inductance ( ) and resistance ( ) as shown in Figure 1. If the IH coil is directly fed from a supply, the ratio of apparent to real power will be large. Therefore, the IH coil is properly compensated by capacitors and additional inductors in suitable configuration so that minimum reactive power is drawn from the source. Additionally to match the load voltage-current requirements to the available source, a matching network is required. The matching is

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