The Effects of Structure Defects on the Performance of a Micro Comb Resonator

A micro comb resonator loaded by alternating electric field is modeled by finite element method, The damping is analyzed by both Couette flow model and Stokes flow model. Structure faults are researched its effects on the dynamic characteristics of the micro comb resonator. The result shows that adhesion fault makes the resonance frequency higher and sensitivity reduction, while crack fault debases the resonance frequency and amplitude. When the crack is located near the end, the stress concentration at the crack location is highest, which is easy to induce the support beam broken.