We developed and tested a novel rotation scanner for nano resolution and accurate rotary motion about the rotation center. The scanner consists of circular hinges and leaf springs so that the parasitic error at the center of the scanner in the X and Y directions is minimized, and rotation performance is optimized. Each sector of the scanner’s system was devised to have nano resolution by minimizing the parasitic errors of the rotation center that arise due to displacements other than rotation. The analytic optimal design results of the proposed scanner were verified using finite element analyses. The piezoelectric actuators were used to attain nano-resolution performances, and a capacitive sensor was used to measure displacement. A feedback controller was used to minimize the rotation errors in the rotation scanner system under practical conditions. Finally, the performance evaluation test results showed that the resonance frequency was 542？Hz, the resolution was 0.09？μrad, and the rotation displacement was 497.2？μrad. Our test results revealed that the rotation scanner exhibited accurate rotation about the center of the scanner and had good nano precision. 1. Introduction Advanced technologies such as semiconductors and liquid crystal displays are at the forefront of the information technology industry. The fundamental requirement of this industry is ultra precision. Ultra precision technology that relates to precise nano motion is known as nano-positioning technology and has been used in various devices, such as ultra-precision machine tools, semiconductor steppers and scanners, atomic force microscope (AFM) actuators, and three-dimensional (3D) measuring instruments, with the goal of ensuring precision at the nanometer level. Various precise positioning stages have been developed, such as piezoelectric-driven and flexure-based Scott-Russell linkages [1–3], a compact precision XY scanner with a voice coil motor and double compound linear spring flexure guide mechanism [4], and a two-dimensional (2D) metrological AFM system with minimal parasitic errors [5]. To obtain a curved-face structure and a free curved-face diffraction grid when molding an aspheric lens, scanners with 6 degrees of freedom (DOF) are required. A nano-rotational scanner should rotate at the rotation center with no parasitic errors. Even though there have been extensive attempts to develop scanners capable of linear displacement, as well as studies verifying their performance, there have been few studies of rotational scanners. Those that have been performed have focused on rotation
References
[1]
S. H. Chang and S. S. Li, “A high resolution long travel friction-drive micropositioner with programmable step size,” Review of Scientific Instruments, vol. 70, no. 6, pp. 2776–2782, 1999.
[2]
S. H. Chang and B. C. Du, “A precision piezodriven micropositioner mechanism with large travel range,” Review of Scientific Instruments, vol. 69, no. 4, pp. 1785–1791, 1998.
[3]
Y. Tian, B. Shirinzadeh, D. Zhang, and G. Alici, “Development and dynamic modelling of a flexure-based Scott-Russell mechanism for nano-manipulation,” Mechanical Systems and Signal Processing, vol. 23, no. 3, pp. 957–978, 2009.
[4]
D. Kang, K. Kim, D. Kim, J. Shim, D.-G. Gweon, and J. Jeong, “Optimal design of high precision XY-scanner with nanometer-level resolution and millimeter-level working range,” Mechatronics, vol. 19, no. 4, pp. 562–570, 2009.
[5]
D.-Y. Lee, D.-M. Kim, and D.-G. Gweon, “Design and evaluation of two dimensional metrological atomic force microscope using a planar nanoscanner,” Japanese Journal of Applied Physics 1, vol. 45, no. 3, pp. 2124–2127, 2006.
[6]
Q. Yao, J. Dong, and P. M. Ferreira, “A novel parallel-kinematics mechanisms for integrated, multi-axis nanopositioning. Part 1. Kinematics and design for fabrication,” Precision Engineering, vol. 32, no. 1, pp. 7–19, 2008.
[7]
Y. Wu and Z. Zhou, “An XYθ mechanism actuated by one actuator,” Mechanism and Machine Theory, vol. 39, no. 10, pp. 1101–1110, 2004.
[8]
Y.-M. Choi, J. J. Kim, J. Kim, and D.-G. Gweon, “Design and control of a nanoprecision XYΘ scanner,” Review of Scientific Instruments, vol. 79, no. 4, Article ID 045109, 7 pages, 2008.
[9]
W. Dong, J. Tang, and Y. ElDeeb, “Design of a linear-motion dual-stage actuation system for precision control,” Smart Materials and Structures, vol. 18, Article ID 095035, 11 pages, 2009.
[10]
K.-B. Choi and D.-H. Kim, “Monolithic parallel linear compliant mechanism for two axes ultraprecision linear motion,” Review of Scientific Instruments, vol. 77, no. 6, Article ID 065106, 7 pages, 2006.
[11]
T. Chang and X. Sun, “Analysis and control of monolithic piezoelectric nano-actuator,” IEEE Transactions on Control Systems Technology, vol. 9, no. 1, pp. 69–75, 2001.
[12]
S. H. Chang, C. K. Tseng, and H. C. Chien, “An ultra-precision XYθZ piezo-micropositioner part II: experiment and performance,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 46, no. 4, pp. 906–912, 1999.
[13]
F.-Z. Hsiao and T.-W. Lin, “Analysis of a novel flexure hinge with three degrees of freedom,” Review of Scientific Instruments, vol. 72, no. 2, pp. 1565–1573, 2001.
[14]
D.-Y. Lee and M.-Y. Lee, “A flexure guided planar scanner for scanning probe microscope; part1: design and analysis of static and dynamic properties,” Transactions of the KSNVE, vol. 15, pp. 667–673, 2005, In Korean.
[15]
S. Salapaka, A. Sebastian, J. P. Cleveland, and M. V. Salapaka, “High bandwidth nano-positioner: a robust control approach,” Review of Scientific Instruments, vol. 73, no. 9, pp. 3232–3241, 2002.
