Micro- and Nanocapillary Structures Based on Dielectric Materials to Focus the Ion Beams

The 150-255 keV proton beams transmission through micro- and nanocapillary structures was studied. The dependences of coefficient of proton beam transmission through tapered glass (borosilicate) capillaries with outlet diameters of 5 and 10 μm were obtained. The focusing and guiding effects for transmitted proton beams were observed. The effect of the structure of nanoporous aluminum oxide on the transmission coefficient and angular characteristics of the transmitted ion beam was studied.