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无机材料学报 2010
Progress of High Frequency and High Output Power FETDOI: 10.3724/sp.j.1077.2010.00897 Keywords: diamond film , high frequency , high output power , FET , review Abstract: Diamond films have been paid much attention in high frequency and high output power field, especially in field effect transistors (FET) with its outstanding electrical properties in the last two decades. For optimum electronics performance, quality of electronic films, good contacts and forming semiconductors are key techniques to make FETs. How to reduce gate length and various parasitic parameters and improve withstand voltage and heat-sinking capability determines whether FETs are of high-performance. The breakouts of key techniques, research progress and related hot spots of diamond films for high frequency and high output power FETs are reviewed. Mechanisms proposed to explain electrical conductivity of H-terminated diamonds are also presented.
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