Structure and Properties of BST/BZT/BST Multilayer Film

Ba 0.6 Sr 0.4 TiO3（BST） thin film, Ba(Zr 0.2 Ti 0.8 )O3（BZT）thin film and Ba 0.6 Sr 0.4 TiO3（BST）/Ba(Zr 0.2 Ti 0.8 )O3（BZT）/Ba 0.6 Sr 0.4 TiO3（BST） (BST/BZT/BST) multilayer thin film were prepared by pulsed laser deposition (PLD) on the LaNiO3 (LNO) coated LaAlO3 (LAO) substrate. All the three kinds of films were characterized by XRD and atomic force microscope (AFM). XRD tests reveal that highquality ［00l］oriented films are obtained.AFM results show that the grain size and root mean square (RMS) roughness of BST/BZT/BST sandwich film are similar to that of BST film and BZT film. Compared with BST and BZT film, the BST/BZT/BST film posses the highest figure of merit FOM (42.07), indicating the highly promising potential of BST/BZT/BST film for the application in tunable microwave device.