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无机材料学报 2009
Microstructure and Photo-absorption Property of V-doped Nano-TiO2 Thin FilmsDOI: 10.3724/sp.j.1077.2009.00034 Keywords: TiO2 thin film , V-doping , microstructure , photo-absorption property Abstract: V-doped nano-TiO2 thin films with different V-dopings were prepared by magnetron sputtering method. The microstructure observation and crystallization mechanism of the films were performed by scanning electron microscope£¨SEM£ and X-ray diffractometer(XRD). Raman spectrum and UV-vis transmittance spectrum of the films were also accomplished by Raman spectrometer and ultraviolet-visible spectrometer. The stress in crystal lattice and photo-absorption property of the films were studied. The results indicate that vanadium dopant in nano-TiO2 thin films can induce the oriented crystallization of TiO2 and form sizable dumbbell-state crystal grains. The addition of vanadium to TiO2 thin films suppresses the expanding of crystal lattice and the generation of rutile. The stress in the V-doped nano-TiO2 films increases with the increase of vanadium content. With the addition of vanadium, the energy level of conduction band of the nano-TiO2 lowers and stretches to bandgap. Thus the bandgap of nano-TiO2 is narrowed down. As a result, the optical absorption edge of the V-doped nano-TiO2 thin films shifts from ultraviolet zone to visible one, enhancing the absorptivity of the films on visible light.
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