Studying accelerometers with capacitive sensing elements

This paper presents types and operating mode of vibration sensors. Differential capacitor sensing elements are often used in integrated accelerometers. It will be investigate the structure and transfer function of the seismic mass type sensing element. The article presents how the piezoelectric sensing element works and compares with capacitor sensing element and how can be modeled with an electronic circuit and Simulink models. The transfer functions of the capacitor sensing element models are studied in Matlab and the results are presented.