MEMS Cantilever Based Immunosensors for Biomolecular Recognition

Bio-Micro Electro Mechanical Systems/Nano Electro Mechanical Systems include a wide variety of sensors, actuators, and complex micro/nano devices for biomedical applications. Recent advances in biosensors have shown that sensors based on bending of microfabricated cantilevers have potential advantages over earlier used detection methods. Thus, a simple cantilever beam can be used as a sensor for biomedical, chemical and environmental applications. Here, microfabricated multilayered cantilever beam is exposed to sensing environment. Lower layer being pure structural silicon or polymer and upper layer with antigen/antibody immobilized in it. Obviously, it has an affinity towards its counterpart i.e. antibody/antigen. In the sensing environment, if counter elements exists, they get captured by this sensing beam head, and the cantilever beam deflects. This deflection can be sensed and the presence of counter elements in the environment can be predicted. In this work, a model of a biosensor for sensing antibody/antigen reaction is developed and simulated using HFSS.Simulating a cantilever with improved sensitivity is done using Intellisuit software.