Characterization of an 2x2 SCB Optical Switch Integrated with VOA

This work presents the modeling, simulation and characterization of an innovative micromachined 2x2 optical switch monolithically integrated with variable optical attenuators. The device uses bi-stable mechanisms for optical switching, and can be easily realized by a standard micromachining process. The split-cross-bar design (SCB) is employed as the optical path configuration. A one-dimensional (1-D) heat transfer model is developed for estimating temperature elevation. An analytical solution is also proposed for the thermo-elastic bending and buckling problem of thermal V-beam and curved beam (pre-shaped buckled beam) actuators. The resulting governing equations with external y-directed force and thermal strain force are solved analytically. Results of the analytical solutions and the finite element (FEM) calculations are compared, with prediction accuracy within 10% of the nonlinear FEM solution, which agrees well with the experimental data.