Odre ivanje debljine tankih polimernih filmova s pomo u rezonatora i FIB/SEM analizom / Thickness estimation of thin polymer films by means of the vibrating reed technique and FIB/SEM analysis

Tankim se filmovima smatraju oni filmovi ija se svojstva zbog reducirane debljine razlikuju od svojstava u bulk* sustavima. Kod polimernih filmova jedan od uzroka razli itih svojstava je preferirana orijentacija bo nih lanaca na su eljima, to uzrokuje i razliku u slobodnom volumenu po presjeku. Rezultati analiza nu no se prikazuju u ovisnosti o debljini. Razlika u strukturi ote ava odre ivanje debljine filma metodama uobi ajenim za polimerne filmove kao to su elipsometrija, rendgenska difraktometrija, profilometrija i sl. U ovom radu debljina polimernog filma na podlozi od silicija odre ena je s pomo u rezonatora, a rezultati su uspore eni sa slikama dobivenima s pomo u fokusirane ionske zrake i rasterskoga elektronskog mikroskopa FIB/SEM analizom (e. Focused Ion Beam/Scanning Electron Microscopy). Obje metode pokazale su se neovisnima o strukturnim nehomogenostima. / Films with properties that differ from those of bulk systems due to the reduction in thickness are considered thin. One of the reasons for different properties in the case of polymer films is the preferential orientation of side groups at interfaces. This leads to differences in the amount of free volume comparing to that of the bulk. Any analysis of such systems must be presented as a function of thick-ness. The thickness estimation by common methods like ellipsometry, X-ray diffractometry, profilometry etc. might be affected by structural changes. Within this paper the film thicknesses retrieved by the vibrating reed technique are compared with those retrieved by FIB/SEM analyses. Both methods seem to be independent on the structural inhomogeneities.