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Microwave range delay line in the form of coplanar line on a basis of nano ferroelectric filmsKeywords: delay line , the ferroelectric film , coplanar line , phase shift , insertion loss Abstract: Delay line in the form of coplanar line on a basis of nano ferroelectric films with thickness of 40 nm and in the frequency range of 32—37 GHz and relative phase shift less than 90° at control voltage 14 V/μ.
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