The present study investigates Joule heating in piezoresistive microcantilever sensors. Joule heating and thermal deflections are a major source of noise in such sensors. This work uses analytical and numerical techniques to characterise the Joule heating in 4-layer piezoresistive microcantilevers made of silicon and silicon dioxide substrates but with the same U-shaped silicon piezoresistor. A theoretical model for predicting the temperature generated due to Joule heating is developed. The commercial finite element software ANSYS Multiphysics was used to study the effect of electrical potential on temperature and deflection produced in the cantilevers. The effect of piezoresistor width on Joule heating is also studied. Results show that Joule heating strongly depends on the applied potential and width of piezoresistor and that a silicon substrate cantilever has better thermal characteristics than a silicon dioxide cantilever.
References
[1]
Arntz, Y; Seelig, JD; Lang, HP; Zhang, J; Hunziker, P; Ramseyer, JP; Meyer, E; Hegner, M; Gerber, C. Label-Free Protein Assay Based on a Nanomechanical Cantilever Array. Nanotechnology？2003, 14, 86–90.
[2]
Suri, CR; Kaur, J; Gandhi, S; Shekhawat, GS. Label-Free Ultra-Sensitive Detection of Atrazine Based on Nanomechanics. Nanotechnology？2008, 19, 235502–235600.
[3]
McKendry, R; Zhang, J; Arntz, Y; Strunz, T; Hegner, M; Lang, HP; Baller, MK; Certa, U; Meyer, E; Guntherodt, HJ; Gerber, C. Multiple Label-Free Biodetection and Quantitative DNA-Binding Assays on a Nanomechanical Cantilever Array. Proc. Natl. Acad. Sci？2002, 99, 9783–9788.
[4]
Zhang, J; Lang, HP; Huber, F; Bietsch, A; Grange, W; Certa, U; McKendry, R; Guntherodt, HJ; Hegner, M; Gerber, CH. Rapid and Label-Free Nanomechanical Detection of Biomarker Transcripts in Human RNA. Nat. Nanotechnol？2006, 1, 214–220.
Mertens, J; Rogero, C; Calleja, M; Ramos, D; Martin-Gago, JA; Briones, C; Tamayo, J. Label-Free Detection of DNA Hybridization Based on Hydrationinduced Tension in Nucleic Acid Films. Nat. Nanotechnol？2008, 3, 301–307.
[7]
Calleja, M; Nordstrom, M; Alvarez, M; Tamayo, J; Lechuga, LM; Boisen, A. Highly Sensitive Polymer-Based Cantilever-Sensors for DNA Detection. Ultramicroscopy？2005, 105, 215–222.
[8]
Yang, M; Zhang, X; Vafai, K; Ozkan, CS. High Sensitivity Piezoresistive Cantilever Design and Optimization for Analyte-Receptor Binding. J. Micromech. Microeng？2003, 13, 864–872.
[9]
Ibach, H. Physics of Surfaces and Interfaces; Springer-Verlag: Berlin, Germany, 2006.
Tortonese, M; Barrett, R; Quate, C. Atomic Resolution with an Atomic Force Microscope Using Piezoresistive Detection. Appl. Phys. Lett？1993, 62, 834–836.
[12]
Wang, Z; Xu, Y. Design and Optimization of an Ultra-Sensitive Piezoresistive Accelerometer for Continuous Respiratory Sound Monitoring. Sens. Lett？2007, 5, 450–458.
[13]
Lee, J; King, WP. Improved All-Silicon Microcantilever Heaters with Integrated Piezoresistive Sensing. J. Microelectromech. Syst？2008, 17, 432–445.
[14]
Pramanik, C; Saha, H; Gangopadhyay, U. Design Optimization of a High Performance Silicon MEMS Piezoresistive Pressure Sensor for Biomedical Applications. J. Micromech. Microeng？2006, 16, 2060–2066.
[15]
Doll, JC; Park, SJ; Pruitt, BL. Design Optimization of Piezoresistive Cantilevers for Force Sensing in Air And Water. J Appl Phys？2009, 106, 064310:1–064310:12.
[16]
Boisen, A; Thaysen, J; Jensenius, H; Hansen, O. Environmental Sensors Based on Micromachined Cantilevers with Integrated Read-Out. Ultramicroscopy？2000, 82, 11–16.
[17]
Rasmussen, PA; Thaysen, J; Hansen, O; Eriksen, SC; Boisen, A. Optimised Cantilever Bio-Sensor with Piezoresistive Read-Out. Ultramicroscopy？2003, 97, 371–376.
[18]
Na, KH; Kima, YS; Kang, CJ. Fabrication of Piezoresistive Microcantilever Using Surface Micromachining Technique for Biosensors. Ultramicroscopy？2005, 105, 223–237.
[19]
Mukhopadhyay, R; Lorentzen, M; Kjems, J; Besenbacher, F. Nanomechanical Sensing of DNA Sequences Using Piezoresistive Cantilevers. Langmuir？2005, 21, 8400–8408.
[20]
Villanueva, G; Plaza, JA; Montserrat, J; Perez-Murano, F; Bausells, J. Crystalline Silicon Cantilevers for Piezoresistive Detection of Biomolecular Forces. Microelectron. Eng？2008, 85, 1120–1123.
[21]
Zhou, Y; Wang, Z; Wang, C; Ruan, W; Liu, L. Design, Fabrication and Characterization of a Two-Step Released Silicon Dioxide Piezoresistive Microcantilever Immunosensor. J Micromech Microeng？2009, 19, 065026:1–065026:10.
[22]
Chui, BW; Aeschimann, L; Akiyama, T; Staufer, U; de Rooij, NF; Lee, J; Goericke, F; King, WP; Vettiger, P. Advanced Temperature Compensation for Piezoresistive Sensors Based on Crystallographic Orientation. Rev Sci Instrum？2007, 78, 043706:1–043706:6.
[23]
McFarland, AW; Colton, JS. Chemical Sensing with Micromolded Plastic Microcantilevers. J. Microelectromech. Syst？2005, 14, 1375–1385.
[24]
Yu, X; Tang, Y; Zhang, H; Li, T; Wang, W. Design of High-Sensitivity Cantilever and Its Monolithic Integration with CMOS Circuits. IEEE Sens. J？2007, 7, 489–495.
[25]
Thaysen, J; Boisen, A; Hansen, O; Bouwstra, S. Atomic Force Microscopy Probe with Piezoresistive Read-Out and a Highly Symmetrical Wheatstone Bridge Arrangement. Sens. Actuat？2000, 83, 47–53.
[26]
Chui, BW; Stowe, TD; Ju, YS; Goodson, KE; Kenny, TW; Mamin, HJ; Terris, BD; Ried, RP. Low-Stiffness Silicon Cantilever with Integrated Heaters and Piezoresistive Sensors for High-Density AFM Thermomechanical Data Storage. J. Microelectromech. Syst？1998, 7, 69–78.
[27]
Binnig, G; Despont, M; Drechsler, U; H？berle, W; Lutwyche, M; Vettiger, P; Mamin, HJ; Chui, BW; Kenny, TW. Ultrahigh-Density Atomic Force Microscopy Data Storage with Erase Capability. Appl. Phys. Lett？1999, 74, 1329–1331.
[28]
King, WP. Design Analysis of Heated Atomic Force Microscope Cantilevers for Nanotopography Measurements. J. Micromech. Microeng？2005, 15, 2441–2448.
[29]
King, WP; Kenny, TW; Goodson, KE. Comparison of Thermal and Piezoresistive Sensing Approaches for Atomic Force Microscopy Topography Measurements. Appl. Phys. Lett？2004, 85, 2086–2088.
[30]
Choudhury, A; Hesketh, PJ; Hu, Z; Thundat, T. Thermal Characterization and Temperature Control of Piezoresistive Microcantilevers. Proceedings of the 5th IEEE Sensors Conference, Daegu, Korea, 22–25 October, 2006.
[31]
Yang, SM; Yin, TI. Design and Analysis of Piezoresistive Microcantilever for Surface Stress Measurement in Biochemical Sensor. Sens. Actuat. B-Chem？2007, 120, 736–744.
[32]
The MEMS Handbook; Gad-el-Hak, Mohamed, Ed.; CRC Press LLC: Boca Raton, FL, USA, 2002.
[33]
Tufte, ON; Stelzer, EL. Piezoresistive Properties of Silicon Diffused Layers. J. Appl. Phy？1963, 34, 313–318.
[34]
Kanda, Y. A Graphical Representation of the Piezoresistance Coefficients in Silicon. IEEE Trans. Electron. Devices？1982, 29, 64–70.
[35]
Kaviany, M. Principles of Heat Transfer; Wiley-Interscience: New York, NY, USA, 2002.
[36]
Ansari, MZ; Cho, C; Kim, J; Bang, B. Comparison between Deflection and Vibration Characteristics of Rectangular and Trapezoidal Profile Microcantilevers. Sensors？2009, 9, 2706–2718.
[37]
Ansari, MZ; Cho, C. A Study on Bimetallic Effects in Microcantilever Biosensors. Proceedings of the Third International Conference on Biomedical Electronics and Devices (BIODEVICES 2010), Valencia, Spain, January 2010.
