Gas Chromatographic Determination(GC) of Trace Trichlorosilane in High Purity Silicon Tetrachloride for Optical Fibers
光纤原料四氯化硅中微量三氯氢硅的气相色谱分析

GC method for detemining trace SiHCl_3 in high purity SiCl_4 has been developed. The methed,using afused sinica capillary column for separation and a sensitive argon detector for quantitative determination of someimpurities of ppm level,is simple, stable and reliable. the minimum detectable concentration was 0.1 ppm forSIHCl_3. This GC system is resisting to corrosion of the sample in the long run.