A NEW METHOD FOR CALCULATING THE MICROSTRUCTURE''''S STIFFNESS IN AN ACCELEROMETER
微加速度传感器的结构刚度分析新法

The stiffness of microstructures is an important parameter for microsensor. This parameter is usually obtained by FEM approach, and it is difficult to obtain an analytical expression. In this paper, a kind of microaccelerometer with a complex microstructure is designed and its main-axial stiffness is obtained by force method and energy method. The theoretical results are compared with those of FEM approach with good agreement. This methodology is extended to the stiffness analysis of microaccelerometer with symmetric and statically indeterminate microstructures.