NUMERICAL ANALYSIS OF INFLUENCE OF MULTI-LAYER FILMS CONSTRUCTS ON NANOHARDNESS EXPERIMENTS
多层膜结构对硬度实验影响的数值分析

In this paper, in order to annlysis the influence of multi-layer component on microhardness testing, the pressing process of the indenter is simulated by FEPG (Finite Element Program Generator) software. The effects on multi-layers system including of different material soft layers, different thickness proportion between soft layer and hard layer and different layer number in the multilayer are analyzed. A conclusion that multilayer construct according to gradient layer can enhance film performance is drew. It is helpful to provide the reference data for microhardness testing.