High Temperature Oxidization Resistance and Wear Properties of TiAlN Coatings Deposited by MPIIID
MPIIID制备TiAlN涂层的高温抗氧化及摩擦性能

TiAlN coatings with different Al contents were prepared by multi-plasma immersion ion implantation and deposition (MPIIID).The high temperature oxidization resistance and wear properties of these coatings were investigated by energy dispersive X-ray (EDX), scanning electron microscopy (SEM), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), nano-indentation, friction tests. Results revealed that TiAlN coating possessed better oxidation resistance because a protective Al2O3 layer can effectively inhibit the diffusion of oxygen into the coating. When the concerntration of Al reached 6.18 %, the coating had the highest hardness of 38 GPa and excellent wear resistance.