Friction and Wear Behavior of Diamond-like Carbon Multilayer Films in Different Environments
类金刚石多层膜在不同环境下的摩擦磨损行为研究

DLC multilayer films consisting of alternating layers of soft and hard carbon films were deposited on Si wafer by a plasma CVD deposition system.The DLC multilayer films were modified by changing the sub-layer thickness(from 1000 to 25 nm).By using a ball-on-disk tribo-tester,the friction and wear properties of the DLC multilayer films were measured in vacuum,O_2 and dry-air environments respectively.By compared with single-layer DLC film,the change of the multilayer structure had little influence on friction coefficient of the multilayer films.However,the wear rate of the DLC multilayer films was inhibited effectively by the multilayer structure in the film.The wear rate of the multilayer films was lower than that of the single film in reactive(O_2 and dry-air) environments.An environment insensitive DLC multilayer film with excellent wear resistance,approximately in the level of 10~(-8) mm~3/Nm in different environments(dry-air,O_2 and vacuum),was obtained.