Friction and Wear Behavior of Diamond-Like Carbon Film Prepared by Plasma Enhanced Chemical Vapor Deposition
用等离子体增强化学气相沉积技术制备类金刚石碳薄膜的摩擦磨损性能研究

Diamond-like carbon films were prepared on single crystal silicon substrate using direct current radio frequency plasma enhanced chemical vapor deposition (DC-RFPECVD). The structure and morphology of the films were analyzed by means of Raman spectroscopy and atomic force microscopy. The hardness of the film was determined using a nano-indenter. The friction and wear behaviors of the DLC film sliding against Al_2O_3 ball or GCr15 steel ball under dry- and water-lubricated conditions were evaluated using a UMT test rig. The morphology of the wear scar of the counterpart steel ball was observed sing a scanning electron microscope. It was found that the diamond-like carbon film formed on the Si surface was smooth and compact. The DLC film showed good friction-reducing and antiwear behavior as it slid against the ceramic and steel counterparts under unlubricated condition, which was ascribed to the graphitization of the DLC film and the formation of a DLC transferred layer on the counterpart surface. However, the DLC film showed poor friction-reducing and antiwear ability as it slid against the ceramic under water-lubricated condition. This was because water as the lubricant acted to restrain the graphitization of the DLC film and the formation of its transferred layer on the counterpart surface.