Improvement on Polishing Performance of Ce0.8 Zr0.2 O2 Solid Solution Abrasives for ZF7 Optical Glass
Ce0.8Zr0.2O2固溶体磨料对ZF7光学玻璃抛光性能的改善

Ultrafine abrasives Ce1-xZrxO2(x=0,0.2) were prepared via a modified wet-solid mechanochemical method,and their crystalline phase type,morphology,specific surface area,particle size and surface zeta potential were characterized by XRD,TEM and so on.The chemical-mechanical polishing(CMP) performance of as-synthesized abrasives for ZF7 optical glass was evaluated by the material removal rate(MRR) determination and AFM observation.Polishing performance of Ce_(0.8)Zr_(0.2)O_2 solid solution abrasives for ZF7 op...