A Study on the Friction and Wear Performances of MoSx Thin Films Produced by lon Beam Enhanced Deposition and Magnetron Sputtering
离子束增强沉积和磁控溅射硫化钼薄膜的摩擦磨损性能研究

MoSx thin films were deposited by IBED and magnetron sputtering(MS)methodson the surface of IBED Si3N4 and TiN thin films.The friction and wear performances of thinfilms and 5 2 1 00 steel were compared by a SRV testing machine.The results showed that allMoSx films exhibit good tribological behavior.The MS MoSx thin film is better in wear-resis-tance and the IBED MoSx film shows a longer wear life. The wear resistance of IBED Si3N4and TiN film plus MoSx films is 3-4 times and 8- 20 times that of single IBED Si3N4 and TiNfilms and 52100 steel respectively.The analyses indicated that the difference of friction andwear performance between two kinds of MoSx thin films is determined by x values of MoSx,its microstructure and atom mixing state at interface.